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ECR Waveguide Discharge for Inner Coating of Metal Tubes

MPS-Authors
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Hytry,  R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Moeller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Wilhelm,  R.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hytry, R., Moeller, W., & Wilhelm, R. (1991). ECR Waveguide Discharge for Inner Coating of Metal Tubes. In U. Ehlemann, H. G. Lergon, & K. Wiesemann (Eds.), 10th International Symposium on Plasma Chemistry, Symposium Proceedings.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-9670-0
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