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Measuring electro-mechanical properties of thin films on polymer substrates

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Marx,  Vera Maria
Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

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Kirchlechner,  Christoph
Nano-/ Micromechanics of Materials, Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

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Cordill, M. J., Glushko, O., Kreith, J., Marx, V. M., & Kirchlechner, C. (2015). Measuring electro-mechanical properties of thin films on polymer substrates. Microelectronic Engineering, 137(1), 96-100. doi:10.1016/j.mee.2014.08.002.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0023-C731-3
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