A microwave discharge source operating at pressures of several atmospheres

Akimov, V. M.; Witte, G.; Kolesnikova, L. I.; Rusin, L. Y.; Toennies, J. P.

doi:Doi 10.1134/S0020441209030166

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A microwave discharge source operating at pressures of several atmospheres

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Toennies, J. P.
Emeritus Group Molecular Interactions, Max Planck Institute for Dynamics and Self-Organization, Max Planck Society;

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Akimov, V. M., Witte, G., Kolesnikova, L. I., Rusin, L. Y., & Toennies, J. P. (2009). A microwave discharge source operating at pressures of several atmospheres. Instruments and Experimental Techniques, 52(3), 394-399. doi:Doi 10.1134/S0020441209030166.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0029-12F3-A

Abstract

The design of a microwave source in which a discharge is initiated by an electromagnetic surface wave at 2.45 GHz is described. A stable discharge was supported at a gas pressure p (0) exceeding the atmospheric pressure in He, N-2, and in H-2-Ar, H-2-He, and O-2-He mixtures in a 2-mm inner diameter quartz tube with a 0.15-mm diameter nozzle at a 50- to 115-W microwave power. A degree of dissociation of up to 80% was reached for pure H-2 at p (0) = 6 Torr and a 6% mixture of H-2 and He at p (0) = 50 Torr. When p (0) increases to 19 Torr for H-2 and to 300 Torr for the mixture, the hydrogen-atom beam intensity, in spite of a decrease in the degree of dissociation, increases due to narrowing of the beam particle velocity distribution.