A microwave discharge source operating at pressures of several atmospheres

Akimov, V. M.; Witte, G.; Kolesnikova, L. I.; Rusin, L. Y.; Toennies, J. P.

doi:Doi 10.1134/S0020441209030166

アイテム詳細

登録内容を編集ファイル形式で保存

一時保存へ追加

タグ情報を表示リリース履歴を表示詳細要約

公開

学術論文

A microwave discharge source operating at pressures of several atmospheres

MPS-Authors

/persons/resource/persons173691

Toennies, J. P.
Emeritus Group Molecular Interactions, Max Planck Institute for Dynamics and Self-Organization, Max Planck Society;

External Resource

There are no locators available

Fulltext (restricted access)

There are currently no full texts shared for your IP range.

フルテキスト (公開)

公開されているフルテキストはありません

付随資料 (公開)

There is no public supplementary material available

引用

Akimov, V. M., Witte, G., Kolesnikova, L. I., Rusin, L. Y., & Toennies, J. P. (2009). A microwave discharge source operating at pressures of several atmospheres. Instruments and Experimental Techniques, 52(3), 394-399. doi:Doi 10.1134/S0020441209030166.

引用: https://hdl.handle.net/11858/00-001M-0000-0029-12F3-A

要旨

The design of a microwave source in which a discharge is initiated by an electromagnetic surface wave at 2.45 GHz is described. A stable discharge was supported at a gas pressure p (0) exceeding the atmospheric pressure in He, N-2, and in H-2-Ar, H-2-He, and O-2-He mixtures in a 2-mm inner diameter quartz tube with a 0.15-mm diameter nozzle at a 50- to 115-W microwave power. A degree of dissociation of up to 80% was reached for pure H-2 at p (0) = 6 Torr and a 6% mixture of H-2 and He at p (0) = 50 Torr. When p (0) increases to 19 Torr for H-2 and to 300 Torr for the mixture, the hydrogen-atom beam intensity, in spite of a decrease in the degree of dissociation, increases due to narrowing of the beam particle velocity distribution.