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Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength

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Overbuschmann,  J.
Electron Microscopy and Analytics, Center of Advanced European Studies and Research (caesar), Max Planck Society;

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Irsen,  S.
Electron Microscopy and Analytics, Center of Advanced European Studies and Research (caesar), Max Planck Society;

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Overbuschmann, J., Hengster, J., Irsen, S., & Wilhein, T. (2012). Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength. Optics Letters, 37(24), 5100-5012.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0028-60CF-F
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