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An uncooled capacitive sensor for IR detection

MPS-Authors
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Siebke,  G.
Micro Systems Technology, Center of Advanced European Studies and Research (caesar), Max Planck Society;

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Gerngroß,  K.
Micro Systems Technology, Center of Advanced European Studies and Research (caesar), Max Planck Society;

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Holik,  P.
Micro Systems Technology, Center of Advanced European Studies and Research (caesar), Max Planck Society;

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Schmitz,  S.
Micro Systems Technology, Center of Advanced European Studies and Research (caesar), Max Planck Society;

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Rohloff,  M.
Micro Systems Technology, Center of Advanced European Studies and Research (caesar), Max Planck Society;

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Tätzner,  S.
Micro Systems Technology, Center of Advanced European Studies and Research (caesar), Max Planck Society;

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Steltenkamp,  S.
Micro Systems Technology, Center of Advanced European Studies and Research (caesar), Max Planck Society;

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Citation

Siebke, G., Gerngroß, K., Holik, P., Schmitz, S., Rohloff, M., Tätzner, S., et al. (2014). An uncooled capacitive sensor for IR detection. In B. F. Andresen, G. F. Fulop, & C. M. Hanson (Eds.), Proc. SPIE Infrared Technology and Applications XL Baltimore, Maryland, USA ( 24.06.2014). SPIE.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-62DB-3
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