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Journal Article

Nanolithographie mit selbstorganisierenden Masken

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Spatz, J. P., Möller, M., & Ziemann, P. (1999). Nanolithographie mit selbstorganisierenden Masken. Physikalische Blätter, 55(12), 49-52. doi:10.1002/phbl.19990551213.


Cite as: http://hdl.handle.net/11858/00-001M-0000-002C-46E7-1
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