Materials Surface Modification by Plasma Bombardment Under Simultaneous Erosion 
and Redeposition Conditions

Hirooka, Y.; Bohdansky, J.; Goebel, D.M.; Conn, R.W.; Campbell, G.A.; Leung, W.K.; Wilson, K.L.; Bauer, W.; Causey, R.A.; Morse, D.H.

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Materials Surface Modification by Plasma Bombardment Under Simultaneous Erosion and Redeposition Conditions

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Bohdansky, J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hirooka, Y., Bohdansky, J., Goebel, D., Conn, R., Campbell, G., Leung, W., et al. (1987). Materials Surface Modification by Plasma Bombardment Under Simultaneous Erosion and Redeposition Conditions. Nuclear Instruments and Methods in Physics Research. B, 23, 4, 458-470.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-A0FC-E

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