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Journal Article

Energy Distributions of Sputtered Particles

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Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Eckstein, W. (1987). Energy Distributions of Sputtered Particles. Nuclear Instruments and Methods in Physics Research. B, 18, 344-348.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-A355-C
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