Sputtering Yield Dependence on Ion Mass at Low Energy for Ta and W

Hechtl, E.; Varga, P.; Bohdansky, J.; Roth, J.

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Sputtering Yield Dependence on Ion Mass at Low Energy for Ta and W

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Bohdansky, J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Roth, J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hechtl, E., Varga, P., Bohdansky, J., & Roth, J. (n.d.). Sputtering Yield Dependence on Ion Mass at Low Energy for Ta and W. In Symposium on Sputtering (pp. 834).

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-A391-4

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