Computer Simulation of Low Energy Static Single Crystal Sputtering

Hou, M.; Eckstein, W.

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Computer Simulation of Low Energy Static Single Crystal Sputtering

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Eckstein, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hou, M., & Eckstein, W. (1986). Computer Simulation of Low Energy Static Single Crystal Sputtering. Nuclear Instruments and Methods in Physics Research. B, 13, 324.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-A3A5-7

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