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Conference Paper

Contributions of Backscattered Ions to Sputtering Yields Depending on Primary Ion Energy

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Weissmann,  R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Behrisch,  R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Weissmann, R., & Behrisch, R. (1973). Contributions of Backscattered Ions to Sputtering Yields Depending on Primary Ion Energy. Ion Surface Interaction, 19, 55-61.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-B161-0
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