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Conference Paper

A Study of the Neutral Species rf Sputtered from Oxide Target

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Taglauer,  E.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Coburn, J., Taglauer, E., & Kay, E. (1975). A Study of the Neutral Species rf Sputtered from Oxide Target. In Vacuum (pp. 501-504).


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-B719-A
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