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Journal Article

Diagnostics of an RF Sputtering Glow Discharge - Correlation Between Atomic Absorption and Mass Spectrometry

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Eckstein, E., Coburn, J., & Kay, E. (1975). Diagnostics of an RF Sputtering Glow Discharge - Correlation Between Atomic Absorption and Mass Spectrometry. International Journal of Mass Spectrometry and Ion Physics, 17, 129-138.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-B726-C
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