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Journal Article

Sputtering Yields for Light Ions as a Function of Angle of Incidence

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Bohdansky,  J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Bay, H., & Bohdansky, J. (1979). Sputtering Yields for Light Ions as a Function of Angle of Incidence. Applied Physics, 19, 421-426.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-BA9C-A
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