Preferential Sputtering of Tantalum Oxide: Reemission of Helium and Transient 
Effects in the Altered Layer

Baretzky, B.; Kiriakidis, G.; Taglauer, E.

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Preferential Sputtering of Tantalum Oxide: Reemission of Helium and Transient Effects in the Altered Layer

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Taglauer, E.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Baretzky, B., Kiriakidis, G., & Taglauer, E. (1986). Preferential Sputtering of Tantalum Oxide: Reemission of Helium and Transient Effects in the Altered Layer. In Erosion and Growth of Solids Stimulated by Atom and Ion Beams (pp. 146-150). Nijhoff.

引用: https://hdl.handle.net/11858/00-001M-0000-0028-BAD5-A

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