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Journal Article

On the Influence of Reactive Gases on Sputtering and Secondary Ion Emission

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Hofer, W., & Martin, P. (1978). On the Influence of Reactive Gases on Sputtering and Secondary Ion Emission. Applied Physics, 16, 271-278.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-BD0D-0
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