Deceleration Ion Optical Systems for Sputtering Measurements between 50 eV as 
Function of Angle of Incidence

Liebl, H.; Bohdansky, J.; Roth, J.; Dose, V.

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Deceleration Ion Optical Systems for Sputtering Measurements between 50 eV as Function of Angle of Incidence

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Liebl, H.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Bohdansky, J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Roth, J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Dose, V.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Max Planck Institute for Plasma Physics, Max Planck Society;

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Liebl, H., Bohdansky, J., Roth, J., & Dose, V. (1987). Deceleration Ion Optical Systems for Sputtering Measurements between 50 eV as Function of Angle of Incidence. Review of Scientific Instruments, 58, 10, 1830-1832.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-BD89-9

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