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Journal Article

Statistics of Sputtering

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Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Eckstein, W. (1988). Statistics of Sputtering. Nuclear Instruments and Methods in Physics Research. B, 33, s. 1-4, 489-492.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-BE53-A
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