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Journal Article

A Mass Spectrometric Study of Neutral-Sputtered Species in an Rf Glow Discharge Sputtering System

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Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Coburn, J., Eckstein, W., & Kay, E. (1975). A Mass Spectrometric Study of Neutral-Sputtered Species in an Rf Glow Discharge Sputtering System. Journal of Vacuum Science and Technology, 12, 151.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-C09F-2
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