Helium Implantation Effects in Hard Hydrogenated Carbon Layers

Boutard, D.; Gudowska, I.; Scherzer, B.M.U.; Moeller, W.

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Helium Implantation Effects in Hard Hydrogenated Carbon Layers

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Moeller, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Boutard, D., Gudowska, I., Scherzer, B., & Moeller, W. (1990). Helium Implantation Effects in Hard Hydrogenated Carbon Layers. Journal of Applied Physics, 68, 5, 2068-2072.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-C4B4-1

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