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Elongated Microwave Electron Cyclotron Resonance Heating Plasma Source

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Wilhelm,  R.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Geisler, M., Kieser, J., Raeuchle, E., & Wilhelm, R. (1990). Elongated Microwave Electron Cyclotron Resonance Heating Plasma Source. Journal of Vacuum Science and Technology, 8, 908-915.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0028-C894-9
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