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Influence of the Deposition Gas on the Properties of Plasma-Deposited Carbonized Layers

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Moeller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Boutard, D., & Moeller, W. (1991). Influence of the Deposition Gas on the Properties of Plasma-Deposited Carbonized Layers. Surface and Coatings Technology, 45, s. 1-3, 353-358.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0028-C92E-5
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