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In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas

MPS-Authors
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Jacob,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Moeller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Wilhelm,  R.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Koch, A., Clausing, R., Engelhard, M., Horton, L., Jacob, W., Angus, J., et al. (1991). In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas. In Diamond and Diamond-Like Films and Coatings (pp. 281-288). Plenum Press.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0028-C98E-F
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