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Dynamic Monte Carlo Simulation of Ion Beam and Plasma Techniques

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Moeller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Moeller, W., Harper, J., Miyake, K., McNeil, J., & Gorbatkin, S. (1991). Dynamic Monte Carlo Simulation of Ion Beam and Plasma Techniques. In Low Energy Ion Beam and Plasma Modification of Materials (pp. 3-8).


Cite as: http://hdl.handle.net/11858/00-001M-0000-0028-C996-C
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