Dynamic Monte Carlo Simulation of Ion Beam and Plasma Techniques

Moeller, W.; Harper, J.M.E.; Miyake, K.; McNeil, J.R.; Gorbatkin, S.M.

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Dynamic Monte Carlo Simulation of Ion Beam and Plasma Techniques

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Moeller, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Moeller, W., Harper, J., Miyake, K., McNeil, J., & Gorbatkin, S. (1991). Dynamic Monte Carlo Simulation of Ion Beam and Plasma Techniques. In Low Energy Ion Beam and Plasma Modification of Materials (pp. 3-8).

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-C996-C

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