Limitations of Interface Sharpness in a-Si:H/a-SiC:H Multilayers

Schwarz, R.; Fischer, T.; Hanesch, P.; Muschik, T.; Kolodzey, J.; Cerva, H.; Meyerheim, H.L.; Scherzer, B.M.U.

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Limitations of Interface Sharpness in a-Si:H/a-SiC:H Multilayers

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Hanesch, P.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz, R., Fischer, T., Hanesch, P., Muschik, T., Kolodzey, J., Cerva, H., et al. (1991). Limitations of Interface Sharpness in a-Si:H/a-SiC:H Multilayers. Appl. Surf. Science, 50, 456-461.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-CA92-C

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