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Journal Article

The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon Films

MPS-Authors
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Jacob,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Moeller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Reinke, P., Jacob, W., & Moeller, W. (1993). The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon Films. Journal of Applied Physics, 74, 2, 1354-1361.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-CBCD-F
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