The Effect of Target Texture on Spatial Distribution of Sputtered Material

Zhukova, Yu.N.; Eisert, J. (Uebers. ); Mashkova, E.S.; Molchanov, V.A.; Eckstein, W.; et al.,

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The Effect of Target Texture on Spatial Distribution of Sputtered Material

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Eckstein, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Zhukova, Y., Eisert, J. (. )., Mashkova, E., Molchanov, V., Eckstein, W., & et al. (1992). The Effect of Target Texture on Spatial Distribution of Sputtered Material. Poverkhnost, 12, 19-23.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-CC33-1

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