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Progress in the Development of a Large-Area RF Plasma Generator

MPS-Authors
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Feist,  J.-H.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Kraus,  W.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Speth,  E.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Ciric,  M.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Heinemann,  B.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Probst,  F.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Experimental Plasma Physics 2 (E2), Max Planck Institute for Plasma Physics, Max Planck Society;
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Riedl,  R.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Feist, J.-H., Miley, G., Kraus, W., Elliott, C., Speth, E., Ciric, M., et al. (1996). Progress in the Development of a Large-Area RF Plasma Generator. 16th IEEE/NPSS Symposium Fusion Engineering, Vol. 2, 976-979.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0028-D061-D
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