An RF Source Optimized for Low Pressure Operation

Kraus, W.; Beaumont, B.; Frank, P.; Libeyre, P.; Heinemann, B.; De Gentile, B.; Riedl, R.; et al.,; Speth, E.; Vollmer, O.

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An RF Source Optimized for Low Pressure Operation

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Kraus, W.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Heinemann, B.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Riedl, R.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Speth, E.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Kraus, W., Beaumont, B., Frank, P., Libeyre, P., Heinemann, B., De Gentile, B., et al. (1998). An RF Source Optimized for Low Pressure Operation. Fusion Technology 1998, Vol. 1, 441-444.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-D1A3-2

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