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Untersuchung zum Ätzen von Silizium in alkalischen und fluoridhaltigen Elektrolyten

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Costa Kieling,  Virginia
Physical Chemistry, Fritz Haber Institute, Max Planck Society;

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Citation

Costa Kieling, V. (1993). Untersuchung zum Ätzen von Silizium in alkalischen und fluoridhaltigen Elektrolyten. PhD Thesis, Technische Universität, Berlin.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0029-7327-6
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