Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer 
during HIPIMS/DCMS co-deposition

Greczynski, Grzegorz; Patscheider, Joerg; Lu, Jun; Alling, Björn; Ektarawong, A.; Jensen, Jens M.; Petrov, Ivan G.; Greene, Joseph E.; Hultman, Lars

doi:10.1016/j.surfcoat.2015.09.001

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Control of Ti_1−xSi_xN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition

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Alling, Björn
Adaptive Structural Materials (Simulation), Computational Materials Design, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;
Department of Physics, Chemistry and Biology (IFM), Thin Film Physics Division, Linköping University, Linköping, Sweden;

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Greczynski, G., Patscheider, J., Lu, J., Alling, B., Ektarawong, A., Jensen, J. M., et al. (2015). Control of Ti_1−xSi_xN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition. Surface and Coatings Technology, 280, 174-184. doi:10.1016/j.surfcoat.2015.09.001.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002A-5A1A-E

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