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Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition

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Alling,  Björn
Adaptive Structural Materials (Simulation), Computational Materials Design, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;
Department of Physics, Chemistry and Biology (IFM), Thin Film Physics Division, Linköping University, Linköping, Sweden;

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Greczynski, G., Patscheider, J., Lu, J., Alling, B., Ektarawong, A., Jensen, J. M., et al. (2015). Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition. Surface and Coatings Technology, 280, 174-184. doi:10.1016/j.surfcoat.2015.09.001.


Cite as: https://hdl.handle.net/11858/00-001M-0000-002A-5A1A-E
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