Role of heat accumulation in the multi-shot damage of silicon irradiated with 
femtosecond XUV pulses at a 1 MHz repetition rate

Sobierajski, Ryszard; Jacyna, Iwanna; Dłużewski, Piotr; Klepka, Marcin T.; Klinger, Dorota; Pełka, Jerzy B.; Burian, Tomáš; Hájková, Věra; Juha, Libor; Saksl, Karel; Vozda, Vojtěch; Makhotkin, Igor; Louis, Eric; Faatz, Bart; Tiedtke, Kai; Toleikis, Sven; Enkisch, Hartmut; Hermann, Martin; Strobel, Sebastian; Loch, Rolf; Chalupsky, Jaromir

doi:10.1364/OE.24.015468

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Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate

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Loch, Rolf
Miller Group, Atomically Resolved Dynamics Department, Max Planck Institute for the Structure and Dynamics of Matter, Max Planck Society;

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http://dx.doi.org/10.1364/OE.24.015468
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Citation

Sobierajski, R., Jacyna, I., Dłużewski, P., Klepka, M. T., Klinger, D., Pełka, J. B., et al. (2016). Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate. Optics Express, 24(14), 15468-15477. doi:10.1364/OE.24.015468.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002B-1DC3-2

Abstract

The role played by heat accumulation in multi-shot damage of silicon was studied. Bulk silicon samples were exposed to intense XUV monochromatic radiation of a 13.5 nm wavelength in a series of 400 femtosecond pulses, repeated with a 1 MHz rate (pulse trains) at the FLASH facility in Hamburg. The observed surface morphological and structural modifications are formed as a result of sample surface melting. Modifications are threshold dependent on the mean fluence of the incident pulse train, with all threshold values in the range of approximately 36-40 mJ/cm². Experimental data is supported by a theoretical model described by the heat diffusion equation. The threshold for reaching the melting temperature (45 mJ/cm²) and liquid state (54 mJ/cm²), estimated from this model, is in accordance with experimental values within measurement error. The model indicates a significant role of heat accumulation in surface modification processes.