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Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

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Pacholski,  Claudia
Dept. New Materials and Biosystems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Balderas-Valadez, R., Agarwal, V., & Pacholski, C. (2016). Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching. RSC Advances, 6, 21430-21434. doi:10.1039/c5ra26816h.


Cite as: http://hdl.handle.net/11858/00-001M-0000-002B-7BD3-F
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