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Design of tunable GHz-frequency optomechanical crystal resonators

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/persons/resource/persons201154

Pfeifer,  Hannes
Painter Research Group, Research Groups, Max Planck Institute for the Science of Light, Max Planck Society;

/persons/resource/persons201241

Zang,  Leyun
Painter Research Group, Research Groups, Max Planck Institute for the Science of Light, Max Planck Society;

/persons/resource/persons201147

Painter,  Oskar
Painter Research Group, Research Groups, Max Planck Institute for the Science of Light, Max Planck Society;

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Citation

Pfeifer, H., Paraiso, T., Zang, L., & Painter, O. (2016). Design of tunable GHz-frequency optomechanical crystal resonators. OPTICS EXPRESS, 24(11), 1407-1419. doi:10.1364/OE.24.011407.


Cite as: https://hdl.handle.net/11858/00-001M-0000-002D-62C5-E
Abstract
We present a silicon optomechanical nanobeam design with a dynamically tunable acoustic mode at 10.2 GHz. The resonance frequency can be shifted by 90 kHz/V-2 with an on-chip capacitor that was optimized to exert forces up to 1 mu N at 10 V operation voltage. Optical resonance frequencies around 190 THz with Q-factors up to 2.2 x 10(6) place the structure in the well-resolved sideband regime with vacuum optomechanical coupling rates up to g(0)/2 pi = 353 kHz. Tuning can be used, for instance, to overcome variation in the device-to-device acoustic resonance frequency due to fabrication errors, paving the way for optomechanical circuits consisting of arrays of optomechanical cavities. (C) 2016 Optical Society of America