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Effect of fabrication errors on the diffraction pattern produced by sawtooth gratings

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Harder,  Irina
Optical Design and Microoptics, Leuchs Division, Max Planck Institute for the Science of Light, Max Planck Society;

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Lindlein,  Norbert
Optical Design and Microoptics, Leuchs Division, Max Planck Institute for the Science of Light, Max Planck Society;

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Citation

Jose Torcal-Milla, F., Harder, I., & Lindlein, N. (2010). Effect of fabrication errors on the diffraction pattern produced by sawtooth gratings. APPLIED OPTICS, 49(9), 1599-1606. doi:10.1364/AO.49.001599.


Cite as: http://hdl.handle.net/11858/00-001M-0000-002D-6B17-C
Abstract
In this work we investigate, analytically and numerically, the effect on the diffracted field produced by typical fabrication errors in sawtooth gratings. The analysis is carried out for the near and far field, showing the effects on the intensity and on the diffraction orders efficiency. When the grating profile is not perfect but presents a curved profile or overdevelopment error, some different diffraction orders appear, changing the intensity and the efficiency of each order. In addition, when roughness is present, a decreasing of efficiency is produced, but without generating different diffraction orders than the first one. We show the analytical dependence of these modifications in terms of the profile of the grating, corroborating the results with numerical methods. (C) 2010 Optical Society of America