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Interferometric quasi-absolute tests for aspherics using a radial shear position

MPS-Authors
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Mantel,  Klaus
Optical Design and Microoptics, Leuchs Division, Max Planck Institute for the Science of Light, Max Planck Society;

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Harder,  Irina
Optical Design and Microoptics, Leuchs Division, Max Planck Institute for the Science of Light, Max Planck Society;

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Lindlein,  Norbert
Optical Design and Microoptics, Leuchs Division, Max Planck Institute for the Science of Light, Max Planck Society;

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Leuchs,  Gerd
Leuchs Division, Max Planck Institute for the Science of Light, Max Planck Society;

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Citation

Mantel, K., Geist, E., Harder, I., Lindlein, N., & Leuchs, G. (2009). Interferometric quasi-absolute tests for aspherics using a radial shear position. OPTICS LETTERS, 34(20), 3178-3180.


Cite as: https://hdl.handle.net/11858/00-001M-0000-002D-6BA5-E
Abstract
Increasing accuracy requirements in aspheric metrology make the development of absolute testing procedures for aspheric surfaces important. One strategy is transferring the standard practice three-position test for spheres to aspherics. The three-position test, however, involves a cat's eye position and therefore has certain drawbacks. We propose an absolute testing method for rotationally symmetric aspherics where the cat's eye position is replaced with a radially sheared position. Together with rotational movements of the specimen, the surface deviations can be obtained in an absolute manner. To demonstrate the validity of the procedure, we present a measurement result for a sphere and compare it with a result obtained by the standard three-position test. (C) 2009 Optical Society of America