Enhancement of optical absorption and photocurrent of 6H-SiC by laser surface 
nanostructuring

Zhao, Q. Z.; Ciobanu, F.; Malzer, S.; Wang, L. J.

doi:10.1063/1.2786863

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Enhancement of optical absorption and photocurrent of 6H-SiC by laser surface nanostructuring

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Malzer, S.
Max Planck Research Group, Max Planck Institute for the Science of Light, Max Planck Society;

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Wang, L. J.
Max Planck Research Group, Max Planck Institute for the Science of Light, Max Planck Society;

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Citation

Zhao, Q. Z., Ciobanu, F., Malzer, S., & Wang, L. J. (2007). Enhancement of optical absorption and photocurrent of 6H-SiC by laser surface nanostructuring. APPLIED PHYSICS LETTERS, 91(12): 121107. doi:10.1063/1.2786863.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002D-6D18-9

Abstract

Nanoscale ripple structures with spatial periods of up to 155 nm are generated by a single beam ultrashort pulsed laser structuring of 6H-SiC surface. The period of nanoripples does not depend on the laser fluence and the number of pulses. Optical absorption and photocurrent measurements on SiC samples are investigated before and after laser nanostructuring. Nearly 40% enhancement of optical absorption and a factor of 3 increase of photocurrent are achieved after laser nanostructuring. (c) 2007 American Institute of Physics.