English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT

Released

Journal Article

Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

MPS-Authors
/persons/resource/persons75927

Pacholski,  Claudia
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;
Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany;

Fulltext (public)
There are no public fulltexts stored in PuRe
Supplementary Material (public)
There is no public supplementary material available
Citation

Balderas-Valadez, R., Agarwal, V., & Pacholski, C. (2016). Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching. RSC Advances, 6(26), 21430-21434. doi:10.1039/c5ra26816h.


Cite as: http://hdl.handle.net/11858/00-001M-0000-002B-7BD3-F
Abstract
Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.