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Journal Article

Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

MPS-Authors
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Pacholski,  Claudia
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;
Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany;

External Resource

http://pubs.rsc.org/en/content/articlepdf/2016/ra/c5ra26816h
(Any fulltext)

https://dx.doi.org/10.1039/C5RA26816H
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Citation

Balderas-Valadez, R., Agarwal, V., & Pacholski, C. (2016). Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching. RSC Advances, 6(26), 21430-21434. doi:10.1039/c5ra26816h.


Cite as: https://hdl.handle.net/11858/00-001M-0000-002B-7BD3-F
Abstract
Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.