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Simulating different manufactured antireflective sub-wavelength structures considering the influence of local topographic variations

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Morhard,  Christoph
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;

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Pacholski,  Claudia
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;
Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany;

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Spatz,  Joachim P.
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;
Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany;

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Citation

Lehr, D., Helgert, M., Sundermann, M., Morhard, C., Pacholski, C., Spatz, J. P., et al. (2010). Simulating different manufactured antireflective sub-wavelength structures considering the influence of local topographic variations. Optics Express, 18(23), 23878-23890. doi:10.1364/OE.18.023878.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-4F93-3
Abstract
Laterally structured antireflective sub-wavelength structures show unique properties with respect to broadband performance, damage threshold and thermal stability. Thus they are superior to classical layer based antireflective coatings for a number of applications. Dependent on the selected fabrication technology the local topography of the periodic structure may deviate from the perfect repetition of a sub-wavelength unit cell. We used rigorous coupled-wave analysis (RCWA) to simulate the efficiency losses due to scattering effects based on height and displacement variations between the individual protuberances. In these simulations we chose conical and Super-Gaussian shapes to approximate the real profile of fabricated structures. The simulation results are in accordance with the experimentally determined optical properties of sub-wavelength structures over a broad wavelength range. Especially the transmittance reduction in the deep-UV could be ascribed to these variations in the sub-wavelength structures.