Micellar inorganic-olymer hybrid systems - a tool for nanolithography

Spatz, Joachim P.; Herzog, Thomas; Mößmer, Stefan; Ziemann, Paul; Möller, Martin

doi:10.1002/(SICI)1521-4095(199902)11:2<149::AID-ADMA149>3.0.CO;2-W

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Micellar inorganic-olymer hybrid systems - a tool for nanolithography

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Spatz, Joachim P.
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;
Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany;

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http://onlinelibrary.wiley.com/doi/10.1002/(SICI)1521-4095(199902)11:2%3C149::AID-ADMA149%3E3.0.CO;2-W/epdf
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Citation

Spatz, J. P., Herzog, T., Mößmer, S., Ziemann, P., & Möller, M. (1999). Micellar inorganic-olymer hybrid systems - a tool for nanolithography. Advanced Materials, 11(2), 149-153. doi:10.1002/(SICI)1521-4095(199902)11:2<149:AID-ADMA149>3.0.CO;2-W.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002C-46EE-4

Abstract

A approach to nanolithography based on the self-assembly and formation of mono-micellar films of a diblock-copolymer is reported. The Figure shows the formation of islands using an inorganically modified micellar mask. Au3+ in the micelles leads to islands while the formation of a Au-nanoparticle in each single micelle results in holes, owing to an inversion of the etching rate.