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Block copolymer micelle nanolithography on non-conductive substrates

MPS-Authors
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Glass,  Roman
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;

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Arnold,  Marco
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;

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Cavalcanti-Adam,  Elisabetta Ada
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;
Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany;

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Blümmel,  Jacques
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;

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Spatz,  Joachim P.
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;
Biophysical Chemistry, Institute of Physical Chemistry, University of Heidelberg, 69120 Heidelberg, Germany;

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Citation

Glass, R., Arnold, M., Cavalcanti-Adam, E. A., Blümmel, J., Haferkemper, C., Dodd, C., et al. (2004). Block copolymer micelle nanolithography on non-conductive substrates. New Journal of Physics, 6, 101-118. doi:10.1088/1367-2630/6/1/101.


Cite as: https://hdl.handle.net/11858/00-001M-0000-002C-C8A8-5
Abstract
A new lithographic technique has been developed and applied to cell adhesion studies and electro-optical material development. Attachment of 6 nm Au particles, in periodic and non-periodic pattern, onto non-conductive substrates has been achieved. This was performed via a combination of diblock copolymer self-assembly and electron beam lithographic techniques. To optimize e-beam resolution on non-conductive materials, an additional carbon layer was thread-coated onto the substrates. This carbon coating and the diblock copolymer used in the self-assembly step were simultaneously removed by a final hydrogen plasma treatment to reveal Au nanodot patterns of unprecedented pattern quality. These optically transparent substrates (glass cover slips) were bio-functionalized via the Au-dot patterns to yield a platform for unique cell adhesion studies. The same Au-dot patterning technique was applied to sapphire substrates, which were subsequently employed to nucleate electro-optically active ZnO nanopost growth.