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Journal Article

Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy

MPS-Authors
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Zakerin,  Marjan
Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society;

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Butt,  Hans-Jürgen
Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society;

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Berger,  Rüdiger
Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society;

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sensors-17-01191.pdf
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Citation

Zakerin, M., Novak, A., Toda, M., Emery, Y., Natalio, F., Butt, H.-J., et al. (2017). Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy. Sensors, 17(6): 1191. doi:10.3390/s17061191.


Cite as: http://hdl.handle.net/11858/00-001M-0000-002D-BA48-9
Abstract
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