Oberflächenprozesse beim Wachstum von a-C:H-Schichten in gepulsten Plasmen

Bauer, M.

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Oberflächenprozesse beim Wachstum von a-C:H-Schichten in gepulsten Plasmen

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Bauer, M.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Bauer, M. (2003). Oberflächenprozesse beim Wachstum von a-C:H-Schichten in gepulsten Plasmen. Talk presented at 11. Bundesdeutsche Fachtagung Plasmatechnologie. Ilmenau. 2003-03-09 - 2003-03-12.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002E-92AC-F

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