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Deposition and erosion of hydrocarbon films with nitrogen containing hydrocarbon plasmas

MPS-Authors
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Schwarz-Selinger,  T.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109440

Hopf,  C.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109489

Jacob,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Schwarz-Selinger, T., Hopf, C., & Jacob, W. (2004). Deposition and erosion of hydrocarbon films with nitrogen containing hydrocarbon plasmas. Poster presented at 16th International Conference on Plasma Surface Interactions in Controlled Fusion Devices (PSI 16), Portland, Maine.


Cite as: https://hdl.handle.net/21.11116/0000-0000-054B-7
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