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Deposition of Hydrogenated Carbon Films from Nitrogen Containing Methane Plasmas

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Schwarz-Selinger,  T.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109489

Jacob,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger, T., & Jacob, W. (2003). Deposition of Hydrogenated Carbon Films from Nitrogen Containing Methane Plasmas. Talk presented at ASEVA Workshop 14: Reactive Plasmas - Physical and Chemical Processes in Reactive Hydrocarbon Plasmas in Contact with Surfaces. Avila. 2003-07-22 - 2003-07-25.


Cite as: https://hdl.handle.net/21.11116/0000-0000-05E9-4
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