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Particles Behavior in Methane-Hydrogen Plasmas

MPS-Authors

Shimizu,  T.
Max Planck Society;

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Jacob,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

Thomas,  H.
Max Planck Society;

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Citation

Shimizu, T., Jacob, W., Thomas, H., Morfill, G., Sato, N., & Abe, T. (2003). Particles Behavior in Methane-Hydrogen Plasmas. Talk presented at 56th Gaseous Electronics Conference. San Francisco,CA. 2003-10-21 - 2003-10-24.


Cite as: http://hdl.handle.net/21.11116/0000-0000-12E9-5
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