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Growth and erosion of amorphous carbon (a-C:H) films by low-temperature laboratory plasmas containing H and N mixtures

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Schwarz-Selinger,  T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hopf,  C.
Experimental Plasma Physics 4 (E4), Max Planck Institute for Plasma Physics, Max Planck Society;
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Sun,  C.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger, T., Hopf, C., Sun, C., & Jacob, W. (2006). Growth and erosion of amorphous carbon (a-C:H) films by low-temperature laboratory plasmas containing H and N mixtures. Talk presented at 17th International Conference on Plasma Surface Interactions in Controlled Fusion Devices (PSI 17). Hefei Anhui. 2006-05-22 - 2006-05-26.


Cite as: https://hdl.handle.net/21.11116/0000-0000-13B4-F
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