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Stickstoffbeimischung in Kohlenwasserstoffplasmen - eine Lösung für die Redepositionsproblematik in Fusionsexperimenten?

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Schwarz-Selinger,  T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hopf,  C.
Experimental Plasma Physics 4 (E4), Max Planck Institute for Plasma Physics, Max Planck Society;
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger, T., Jacob, W., & Hopf, C. (2007). Stickstoffbeimischung in Kohlenwasserstoffplasmen - eine Lösung für die Redepositionsproblematik in Fusionsexperimenten?. Talk presented at 14. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen. Mühlleithen. 2007-03-13 - 2007-03-15.


Cite as: https://hdl.handle.net/21.11116/0000-0000-196A-E
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