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Combined Magnetron Sputtering and Ion Implantation - a High Energy Ion Assisted Deposition Method for Producing Nanostructurated Coatings

MPS-Authors

Maier,  H.
Max Planck Society;

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Neu,  R.
Tokamak Edge and Divertor Physics (E2), Max Planck Institute for Plasma Physics, Max Planck Society;

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引用

Ruset, C., Grigore, E., Maier, H., & Neu, R. (2007). Combined Magnetron Sputtering and Ion Implantation - a High Energy Ion Assisted Deposition Method for Producing Nanostructurated Coatings. Talk presented at Materials Science & Technology 2007 Conference. Detroit, MI. 2007-09-16 - 2007-09-20.


引用: https://hdl.handle.net/21.11116/0000-0000-19D0-9
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